WaferSAGE: Large Language Model-Powered Wafer Defect Analysis via Synthetic Data Generation and Rubric-Guided Reinforcement Learning

arXiv:2604.27629v1 Announce Type: new Abstract: We present WaferSAGE, a framework for wafer defect visual question answering using small vision-language models. To address data scarcity in semiconductor manufacturing, we propose a three-stage synthesis pipeline incorporating structured rubric...